Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11581200 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kensuke HAGA, Atsushi Moriya, Takahiro MIYAKURA | 2023-02-14 |
| 11043392 | Method of manufacturing semiconductor device, substrate processing apparatus and recording medium | Kotaro Murakami, Tetsuya Takahashi, Atsushi Moriya | 2021-06-22 |
| 10529560 | Method of manufacturing semiconductor device, substrate processing apparatus and recording medium | Takahiro MIYAKURA, Atsushi Moriya, Kensuke HAGA | 2020-01-07 |
| 10262872 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takahiro MIYAKURA, Atsushi Moriya, Kensuke HAGA | 2019-04-16 |
| 10199219 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Satoshi Shimamoto, Yoshiro Hirose, Hajime Karasawa, Ryota Horiike, Yoshitomo HASHIMOTO | 2019-02-05 |
| 9997354 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yugo Orihashi, Kazuhiro Yuasa, Atsushi Moriya | 2018-06-12 |
| 9941119 | Method of forming silicon layer in manufacturing semiconductor device and recording medium | Atsushi Moriya, Yugo Orihashi, Kotaro Murakami | 2018-04-10 |
| 9691609 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Atsushi Moriya, Yugo Orihashi, Kotaro Murakami | 2017-06-27 |
| 9540728 | Substrate processing apparatus, apparatus for manufacturing semiconductor device, and gas supply system | Atsushi Moriya, Yugo Orihashi, Kotaro Murakami | 2017-01-10 |
| 9437426 | Method of manufacturing semiconductor device | Kazuhiro Yuasa, Yuki Kitahara | 2016-09-06 |
| 9412587 | Method of manufacturing semiconductor device, substrate processing apparatus, gas supply system, and recording medium | Atsushi Moriya, Yugo Orihashi, Kotaro Murakami | 2016-08-09 |
| 8673076 | Substrate processing apparatus and semiconductor device producing method | — | 2014-03-18 |
| 7883581 | Substrate processing apparatus and method of manufacturing semiconductor device | Kiyohiko Maeda, Masayuki Yamada | 2011-02-08 |
| 7622007 | Substrate processing apparatus and semiconductor device producing method | — | 2009-11-24 |