Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11581200 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kensuke HAGA, Atsushi Moriya, Naoharu Nakaiso | 2023-02-14 |
| 10840094 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kiyohiko Maeda, Masato Terasaki, Yasuhiro Megawa, Akito Hirano, Takashi Nakagawa | 2020-11-17 |
| 10529560 | Method of manufacturing semiconductor device, substrate processing apparatus and recording medium | Atsushi Moriya, Naoharu Nakaiso, Kensuke HAGA | 2020-01-07 |
| 10262872 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Atsushi Moriya, Naoharu Nakaiso, Kensuke HAGA | 2019-04-16 |