Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11581200 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Atsushi Moriya, Naoharu Nakaiso, Takahiro MIYAKURA | 2023-02-14 |
| 10529560 | Method of manufacturing semiconductor device, substrate processing apparatus and recording medium | Takahiro MIYAKURA, Atsushi Moriya, Naoharu Nakaiso | 2020-01-07 |
| 10262872 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takahiro MIYAKURA, Atsushi Moriya, Naoharu Nakaiso | 2019-04-16 |