Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9899211 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Yugo Orihashi, Satoshi Shimamoto | 2018-02-20 |
| 8987146 | Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus and non-transitory computer-readable recording medium | Yugo Orihashi, Satoshi Shimamoto | 2015-03-24 |