Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12195848 | Method of cleaning, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kazuhiro Harada, Yuji Urano, Yasunobu Koshi, Masayoshi Minami | 2025-01-14 |
| 12040179 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takaaki Noda, Kotaro Konno, Takeo Hanashima | 2024-07-16 |
| 11618947 | Method of cleaning, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kazuhiro Harada, Yuji Urano, Yasunobu Koshi, Masayoshi Minami | 2023-04-04 |
| 10032626 | Method of manufacturing semiconductor device by forming a film on a substrate, substrate processing apparatus, and recording medium | Takaaki Noda, Kosuke Takagi, Takeo Hanashima, Mamoru Sueyoshi, Kotaro Konno +1 more | 2018-07-24 |
| 9881789 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Yoshiro Hirose, Ryota Sasajima, Katsuyoshi Harada, Yuji Urano | 2018-01-30 |
| 9865451 | Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takaaki Noda, Yoshiro Hirose | 2018-01-09 |
| 9831082 | Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and non-transitory computer-readable recording medium | Satoshi Shimamoto, Takaaki Noda, Takeo Hanashima, Yoshiro Hirose, Hiroshi Ashihara +1 more | 2017-11-28 |
| 9793107 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takaaki Noda, Satoshi Shimamoto, Yoshiro Hirose, Kiyohiko Maeda | 2017-10-17 |
| 9698007 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takaaki Noda, Satoshi Shimamoto, Yoshiro Hirose, Kiyohiko Maeda | 2017-07-04 |
| 9673043 | Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and recording medium | Takaaki Noda, Satoshi Shimamoto, Hiroshi Ashihara, Takeo Hanashima, Yoshiro Hirose +1 more | 2017-06-06 |
| 9620357 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Yoshiro Hirose, Ryota Sasajima, Katsuyoshi Harada, Yuji Urano | 2017-04-11 |
| 9349586 | Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and non-transitory computer-readable recording medium | Satoshi Shimamoto, Takaaki Noda, Takeo Hanashima, Yoshiro Hirose, Hiroshi Ashihara +1 more | 2016-05-24 |