Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406843 | Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus, and recording medium | Kazuhiro Harada, Shintaro Kogura, Shogo Otani, Yoshitomo HASHIMOTO | 2025-09-02 |
| 12266522 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Kazuyuki Okuda, Syuzo SAKURAI, Yasuhiro Inokuchi | 2025-04-01 |
| 12195848 | Method of cleaning, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kazuhiro Harada, Shingo NOHARA, Yuji Urano, Yasunobu Koshi | 2025-01-14 |
| 11915927 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Kazuyuki Okuda, Syuzo SAKURAI, Yasuhiro Inokuchi | 2024-02-27 |
| 11885016 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus and recording medium | Kazuhiro Harada, Shintaro Kogura | 2024-01-30 |
| 11823886 | Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus, and recording medium | Kazuhiro Harada, Shintaro Kogura, Shogo Otani, Yoshitomo HASHIMOTO | 2023-11-21 |
| 11728159 | Method of manufacturing semiconductor device, surface treatment method, substrate processing apparatus, and recording medium | Kazuhiro Harada, Akihito Yoshino, Masaya NISHIDA, Naoko Kitagawa, Shintaro Kogura +1 more | 2023-08-15 |
| 11618947 | Method of cleaning, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kazuhiro Harada, Shingo NOHARA, Yuji Urano, Yasunobu Koshi | 2023-04-04 |
| 11434564 | Method of manufacturing semiconductor device, substrate processing apparatus, recording medium and method of processing substrate | Kazuhiro Harada, Shintaro Kogura | 2022-09-06 |
| 11361961 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Kazuyuki Okuda, Syuzo SAKURAI, Yasuhiro Inokuchi | 2022-06-14 |
| 11257669 | Method of manufacturing semiconductor device, surface treatment method, substrate processing apparatus, and recording medium | Kazuhiro Harada, Akihito Yoshino, Masaya NISHIDA, Naoko Kitagawa, Shintaro Kogura +1 more | 2022-02-22 |
| 10640869 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kazuyuki Okuda, Yoshinobu Nakamura, Kosuke Takagi, Yukinao KAGA, Yuji Takebayashi | 2020-05-05 |
| 10081868 | Gas supply nozzle, substrate processing apparatus, and non-transitory computer-readable recording medium | Kosuke Takagi, Ryota Sasajima, Shintaro Kogura, Naonori Akae, Risa YAMAKOSHI +2 more | 2018-09-25 |
| 10066294 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Ryota Sasajima, Shintaro Kogura | 2018-09-04 |
| 9983074 | Force detector | Tsutomu Sawai | 2018-05-29 |
| 9895727 | Method of manufacturing semiconductor device, method of cleaning interior of process chamber, substrate processing apparatus, and recording medium | Yoshinobu Nakamura, Masayuki Asai, Kazuyuki Okuda, Yuji Urano | 2018-02-20 |
| D791091 | Pattern wafer | Hiromi Okada, Shinya Morita, Satoshi Aizawa, Kazuyuki Okuda, Masayuki Yamada | 2017-07-04 |
| D789311 | Pattern wafer | Hiromi Okada, Masayuki Yamada, Satoshi Aizawa, Shinya Morita, Kazuhisa Osaka | 2017-06-13 |
| 8901013 | Substrate processing apparatus, method of processing substrate and method of manufacturing semiconductor device | Kazuhiro Yuasa, Masanao Fukuda, Takafumi Sasaki, Yasuhiro Megawa | 2014-12-02 |
| 7972979 | Substrate processing method and substrate processing apparatus | Toru Harada | 2011-07-05 |
| 5910281 | Method for restoring dried aqueous organic gel capsules | Yasushi Kohno, Yoichi Ido, Riichi Minamiguchi | 1999-06-08 |
| 5791084 | Method for making a gel of gel-coat seed easily disintegrable | Yasushi Kohno, Riichi Minamiguchi | 1998-08-11 |
| 5706602 | Method for making a gel coat of gel-coat seed easily disintegrable | Yasushi Kohno, Riichi Minamiguchi | 1998-01-13 |
| 5701700 | Method for storing gel-coated seeds | Yasushi Kohno, Riichi Minamiguchi | 1997-12-30 |