Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12266522 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Kazuyuki Okuda, Yasuhiro Inokuchi, Masayoshi Minami | 2025-04-01 |
| 11915927 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Kazuyuki Okuda, Yasuhiro Inokuchi, Masayoshi Minami | 2024-02-27 |
| 11361961 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Kazuyuki Okuda, Yasuhiro Inokuchi, Masayoshi Minami | 2022-06-14 |