Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11728159 | Method of manufacturing semiconductor device, surface treatment method, substrate processing apparatus, and recording medium | Kazuhiro Harada, Masayoshi Minami, Akihito Yoshino, Masaya NISHIDA, Shintaro Kogura +1 more | 2023-08-15 |
| 11515152 | Method of manufacturing semiconductor device, substrate processing apparatus, and method of processing substrate | Shintaro Kogura, Kazuhiro Harada, Shogo Otani, Koichi Honda, Mamoru Umemoto +3 more | 2022-11-29 |
| 11257669 | Method of manufacturing semiconductor device, surface treatment method, substrate processing apparatus, and recording medium | Kazuhiro Harada, Masayoshi Minami, Akihito Yoshino, Masaya NISHIDA, Shintaro Kogura +1 more | 2022-02-22 |
| 10480069 | Storage device, vaporizer and substrate processing apparatus | Yuichi Wada | 2019-11-19 |