Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11728159 | Method of manufacturing semiconductor device, surface treatment method, substrate processing apparatus, and recording medium | Kazuhiro Harada, Masayoshi Minami, Masaya NISHIDA, Naoko Kitagawa, Shintaro Kogura +1 more | 2023-08-15 |
| 11515152 | Method of manufacturing semiconductor device, substrate processing apparatus, and method of processing substrate | Shintaro Kogura, Kazuhiro Harada, Shogo Otani, Koichi Honda, Mamoru Umemoto +3 more | 2022-11-29 |
| 11257669 | Method of manufacturing semiconductor device, surface treatment method, substrate processing apparatus, and recording medium | Kazuhiro Harada, Masayoshi Minami, Masaya NISHIDA, Naoko Kitagawa, Shintaro Kogura +1 more | 2022-02-22 |
| 9970112 | Substrate processing apparatus and method of manufacturing semiconductor device | Yasunobu Koshi, Kenichi Suzaki | 2018-05-15 |
| 8999858 | Substrate processing apparatus and method of manufacturing semiconductor device | Yasunobu Koshi, Kenichi Suzaki | 2015-04-07 |
| 8304328 | Manufacturing method of semiconductor device and substrate processing apparatus | Takahiro Maeda, Kiyohiko Maeda, Takashi Ozaki, Yasunobu Koshi, Yuji Urano | 2012-11-06 |