Issued Patents All Time
Showing 1–25 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387962 | Substrate processing apparatus, method of processing substrate, method of manufacturing semiconductor device, and recording medium | Hiroshi Ashihara | 2025-08-12 |
| 12371788 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Kazuki NONOMURA | 2025-07-29 |
| 12354887 | Cleaning method, method of manufacturing semiconductor device, and substrate processing apparatus | Gen Li, Hirohisa Yamazaki, Kenichi Suzaki | 2025-07-08 |
| 12293932 | Substrate processing apparatus, elevator and method of manufacturing semiconductor device | Makoto Hirano, Koji Shibata, Yusaku OKAJIMA | 2025-05-06 |
| 12188124 | Substrate processing apparatus, gas nozzle and method of manufacturing semiconductor device | Unryu Ogawa, Toshiki Fujino, Yukihito Hada, Naoko Tsunoda | 2025-01-07 |
| 11996311 | Substrate processing apparatus, method of processing substrate, method of manufacturing semiconductor device, and recording medium | Hiroshi Ashihara | 2024-05-28 |
| 11869790 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Toshiro Koshimaki | 2024-01-09 |
| 11299804 | Method of manufacturing semiconductor device, non-transitory computer-readable recording medium and substrate processing apparatus | Kosuke Takagi, Atsushi Hirano, Ryuichi Nakagawa, Noriyuki Isobe | 2022-04-12 |
| 11031270 | Substrate processing apparatus, substrate holder and mounting tool | Atsushi Hirano, Yukinao KAGA, Masanori Sakai, Masakazu Shimada | 2021-06-08 |
| 11020760 | Substrate processing apparatus and precursor gas nozzle | Toshiki Fujino, Yuma Fujii, Kazuki NONOMURA, Yoshinori Baba, Kenichi Suzaki | 2021-06-01 |
| 10640869 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kazuyuki Okuda, Masayoshi Minami, Yoshinobu Nakamura, Kosuke Takagi, Yukinao KAGA | 2020-05-05 |
| D828091 | Gas supply nozzle | Toshiki Fujino, Yuma Fujii, Kazuki NONOMURA, Yoshinori Baba, Kenichi Suzaki | 2018-09-11 |
| 9768012 | Method for processing substrate and substrate processing apparatus | Hirohisa Yamazaki, Masanori Sakai, Tsutomu Kato | 2017-09-19 |
| 9708708 | Method of manufacturing semiconductor device | Noriyuki Isobe, Kenichi Suzaki, Takeshi Kasai, Atsushi Hirano, Koichi Oikawa | 2017-07-18 |
| 9646821 | Method of manufacturing semiconductor device | Tetsuo Yamamoto, Tsutomu Kato, Satoshi Okada | 2017-05-09 |
| 9496134 | Substrate processing apparatus, method of manufacturing semiconductor device and semiconductor device | Shinya Sasaki, Shintaro Kogura | 2016-11-15 |
| 9437421 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Masakazu Shimada, Atsushi Morikawa | 2016-09-06 |
| 8866271 | Semiconductor device manufacturing method, substrate processing apparatus and semiconductor device | Katsuhiko Yamamoto, Tatsuyuki Saito, Masahisa Okuno | 2014-10-21 |
| 8828141 | Substrate processing apparatus and method for manufacturing semiconductor device | Masanori Sakai, Tsutomu Kato, Shinya Sasaki, Hirohisa Yamazaki | 2014-09-09 |
| 8741731 | Method of manufacturing a semiconductor device | Hirohisa Yamazaki, Sadayoshi Horii, Hideharu Itatani, Arito OGAWA | 2014-06-03 |
| 8481434 | Method of manufacturing a semiconductor device and processing apparatus | Hironobu Miya, Eisuke Nishitani, Masanori Sakai, Hirohisa Yamazaki, Toshinori Shibata +1 more | 2013-07-09 |
| 8461062 | Substrate processing apparatus and method for manufacturing semiconductor device | Masanori Sakai, Tsutomu Kato, Shinya Sasaki, Hirohisa Yamazaki | 2013-06-11 |
| 8420552 | Method of manufacturing a semiconductor device | Hirohisa Yamazaki, Sadayoshi Horii, Hideharu Itatani, Arito OGAWA | 2013-04-16 |
| 8343277 | Substrate processing apparatus | Satoshi Okada, Takashi Nakagawa | 2013-01-01 |
| D655682 | Boat of wafer processing apparatus | Tatsuyuki Saito, Tetsuo Yamamoto, Tsutomu Kato, Satoshi Okada | 2012-03-13 |