Issued Patents All Time
Showing 1–25 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D1086086 | Separator of substrate processing apparatus | — | 2025-07-29 |
| 12293932 | Substrate processing apparatus, elevator and method of manufacturing semiconductor device | Yuji Takebayashi, Makoto Hirano, Koji Shibata | 2025-05-06 |
| 12272579 | Substrate processing apparatus, substrate suppport and method of manufacturing semiconductor device | — | 2025-04-08 |
| 12203167 | Substrate processing apparatus and method of manufacturing semiconductor device | Hidetoshi Mimura, Takafumi Sasaki, Hidenari Yoshida | 2025-01-21 |
| D1042340 | Tubular reactor | — | 2024-09-17 |
| D1022906 | Tubular reactor | — | 2024-04-16 |
| D1022907 | Tubular reactor | — | 2024-04-16 |
| D1022905 | Tubular reactor | — | 2024-04-16 |
| D1022933 | Wafer support of semiconductor manufacturing apparatus | — | 2024-04-16 |
| D1022904 | Tubular reactor | — | 2024-04-16 |
| 11898247 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Hidenari Yoshida, Takafumi Sasaki | 2024-02-13 |
| 11859280 | Substrate processing apparatus and method of manufacturing semiconductor device | Hidetoshi Mimura, Takafumi Sasaki, Hidenari Yoshida | 2024-01-02 |
| D1003834 | Heat insulator cover of semiconductor manufacturing apparatus | — | 2023-11-07 |
| D1003243 | Heat insulator cover of semiconductor manufacturing apparatus | — | 2023-10-31 |
| 11685992 | Substrate processing apparatus, quartz reaction tube and method of manufacturing semiconductor device | Takafumi Sasaki, Hidenari Yoshida, Shuhei Saido, Mitsunori Ishisaka, Hidetoshi Mimura | 2023-06-27 |
| 11453942 | Substrate processing apparatus and method of manufacturing semiconductor device | Hidetoshi Mimura, Takafumi Sasaki, Hidenari Yoshida | 2022-09-27 |
| D937385 | Return nozzle | Mitsunori Takeshita, Shuhei Saido, Hidenari Yoshida | 2021-11-30 |
| D928106 | Supporting column of insulation unit for semiconductor manufacturing apparatus | Shuhei Saido, Hidenari Yoshida | 2021-08-17 |
| D916037 | Cover of seal cap for reaction chamber for semiconductor | Shuhei Saido, Hidenari Yoshida, Takafumi Sasaki | 2021-04-13 |
| 10961625 | Substrate processing apparatus, reaction tube and method of manufacturing semiconductor device | Shuhei Saido, Takafumi Sasaki, Hidenari Yoshida | 2021-03-30 |
| 10923366 | Substrate processing apparatus and method of manufacturing semiconductor device | Shuhei Saido, Hidenari Yoshida, Takafumi Sasaki | 2021-02-16 |
| 10731254 | Protective plate, substrate processing apparatus, and method of manufacturing semiconductor device | Shuhei Saido, Hidenari Yoshida | 2020-08-04 |
| D889596 | Gas nozzle for substrate processing apparatus | Toru Kagaya, Hiroaki Hiramatsu, Shinya Ebata | 2020-07-07 |
| D888196 | Gas nozzle for substrate processing apparatus | Toru Kagaya, Hiroaki Hiramatsu, Shinya Ebata | 2020-06-23 |
| 10573535 | Substrate processing apparatus, lid cover and method of manufacturing semiconductor device | Shuhei Saido, Mika Urushihara | 2020-02-25 |