Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10573535 | Substrate processing apparatus, lid cover and method of manufacturing semiconductor device | Shuhei Saido, Yusaku OKAJIMA | 2020-02-25 |
| D813181 | Cover of seal cap for reaction chamber of semiconductor | Yusaku OKAJIMA, Shuhei Saido | 2018-03-20 |