Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11020760 | Substrate processing apparatus and precursor gas nozzle | Toshiki Fujino, Kazuki NONOMURA, Yoshinori Baba, Yuji Takebayashi, Kenichi Suzaki | 2021-06-01 |
| D828091 | Gas supply nozzle | Toshiki Fujino, Kazuki NONOMURA, Yoshinori Baba, Yuji Takebayashi, Kenichi Suzaki | 2018-09-11 |