Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12371788 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Yuji Takebayashi | 2025-07-29 |
| 12354868 | Cleaning method, method of manufacturing semiconductor device, recording medium, and substrate processing apparatus | Yuma IKEDA, Kenichi Suzaki | 2025-07-08 |
| 12249502 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Kenichi Suzaki, Yoshimasa NAGATOMI | 2025-03-11 |
| 12163226 | Substrate processing apparatus, reaction container, method of manufacturing semiconductor device, and recording medium | — | 2024-12-10 |
| 11020760 | Substrate processing apparatus and precursor gas nozzle | Toshiki Fujino, Yuma Fujii, Yoshinori Baba, Yuji Takebayashi, Kenichi Suzaki | 2021-06-01 |
| D828091 | Gas supply nozzle | Toshiki Fujino, Yuma Fujii, Yoshinori Baba, Yuji Takebayashi, Kenichi Suzaki | 2018-09-11 |