Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12354887 | Cleaning method, method of manufacturing semiconductor device, and substrate processing apparatus | Gen Li, Kenichi Suzaki, Yuji Takebayashi | 2025-07-08 |
| 12234550 | Vaporizer, processing apparatus and method of manufacturing semiconductor device | Gen Li, Kenichi Suzaki | 2025-02-25 |
| 11970771 | Vaporizer, substrate processing apparatus and method for manufacturing semiconductor device | Atsushi Morikawa, Masakazu Shimada, Takeshi Kasai, Kenichi Suzaki, Yoshimasa NAGATOMI | 2024-04-30 |
| 11873555 | Vaporizer, substrate processing apparatus and method of manufacturing semiconductor device | Gen Li, Kenichi Suzaki | 2024-01-16 |
| 11866822 | Vaporizer, substrate processing apparatus, and method of manufacturing semiconductor device | Ryuichi Nakagawa, Kenichi Suzaki, Yasunori EJIRI | 2024-01-09 |
| 11542603 | Substrate processing apparatus, method of manufacturing semiconductor device and substrate processing method | — | 2023-01-03 |
| 11293096 | Substrate processing apparatus, method for manufacturing semiconductor device and vaporizer | Atsushi Morikawa, Masakazu Shimada, Takeshi Kasai, Kenichi Suzaki, Yoshimasa NAGATOMI | 2022-04-05 |
| 10910217 | Method for manufacturing semiconductor device, non-transitory computer-readable recording medium, and substrate processing apparatus | Yoshimasa NAGATOMI | 2021-02-02 |
| 10707074 | Method for manufacturing semiconductor device, non-transitory computer-readable recording medium, and substrate processing apparatus | Yoshimasa NAGATOMI | 2020-07-07 |
| 10297440 | Method of manufacturing semiconductor device | Noriyuki Isobe, Hiroshi Ashihara | 2019-05-21 |
| 10214313 | Bottle | Tadayoshi Oshino, Hiromichi Saito, Takuya Nishimura | 2019-02-26 |
| 9768012 | Method for processing substrate and substrate processing apparatus | Yuji Takebayashi, Masanori Sakai, Tsutomu Kato | 2017-09-19 |
| 9401282 | Method of manufacturing semiconductor device, cleaning method, substrate processing apparatus and non-transitory computer readable recording medium | — | 2016-07-26 |
| 9206931 | Substrate processing apparatus and method of manufacturing semiconductor device | Satoshi Okada, Tsutomu Kato | 2015-12-08 |
| 8828141 | Substrate processing apparatus and method for manufacturing semiconductor device | Masanori Sakai, Yuji Takebayashi, Tsutomu Kato, Shinya Sasaki | 2014-09-09 |
| 8741063 | Substrate processing apparatus and method of manufacturing semiconductor device | Satoshi Okada, Tsutomu Kato | 2014-06-03 |
| 8741731 | Method of manufacturing a semiconductor device | Yuji Takebayashi, Sadayoshi Horii, Hideharu Itatani, Arito OGAWA | 2014-06-03 |
| 8641829 | Substrate processing system | Tomoki Horita, Kazuhiro Hirahara, Hironobu Miya, Atsuhiko Suda | 2014-02-04 |
| 8598047 | Substrate processing apparatus and producing method of semiconductor device | Masanori Sakai, Toru Kagaya | 2013-12-03 |
| 8506714 | Substrate processing system | Tomoki Horita, Kazuhiro Hirahara, Hironobu Miya, Atsuhiko Suda | 2013-08-13 |
| 8481434 | Method of manufacturing a semiconductor device and processing apparatus | Hironobu Miya, Eisuke Nishitani, Yuji Takebayashi, Masanori Sakai, Toshinori Shibata +1 more | 2013-07-09 |
| 8461062 | Substrate processing apparatus and method for manufacturing semiconductor device | Masanori Sakai, Yuji Takebayashi, Tsutomu Kato, Shinya Sasaki | 2013-06-11 |
| 8420552 | Method of manufacturing a semiconductor device | Yuji Takebayashi, Sadayoshi Horii, Hideharu Itatani, Arito OGAWA | 2013-04-16 |
| 7662727 | Method for manufacturing semiconductor device background | Hironobu Miya, Norikazu Mizuno, Masanori Sakai, Shinya Sasaki | 2010-02-16 |
| 6686281 | Method for fabricating a semiconductor device and a substrate processing apparatus | Takaaki Noda | 2004-02-03 |