Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12354848 | Substrate processing apparatus, substrate processing method, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | — | 2025-07-08 |
| 11866822 | Vaporizer, substrate processing apparatus, and method of manufacturing semiconductor device | Hirohisa Yamazaki, Ryuichi Nakagawa, Kenichi Suzaki | 2024-01-09 |