Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400855 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takeo Hanashima | 2025-08-26 |
| 12249503 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Tsukasa Kamakura | 2025-03-11 |
| 11810781 | Method of processing substrate, substrate processing apparatus, recording medium, method of manufacturing semiconductor device | Tsukasa Kamakura | 2023-11-07 |
| 11784044 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takeo Hanashima | 2023-10-10 |
| 11728162 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Tsukasa Kamakura, Ryota Kataoka | 2023-08-15 |
| 11476113 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Ryota Kataoka, Hiroaki Hiramatsu | 2022-10-18 |
| 8497192 | Method of manufacturing a semiconductor device and substrate processing apparatus | Atsushi Moriya, Takaaki Noda, Kiyohiko Maeda | 2013-07-30 |
| 8025739 | Method of manufacturing semiconductor device | Yasuhiro Inokuchi, Atsushi Moriya, Yoshiaki Hashiba | 2011-09-27 |