Issued Patents All Time
Showing 1–25 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12195854 | Substrate processing apparatus, method of processing substrate, method of manufacturing semiconductor device, and recording medium | Teruo Yoshino, Takeshi Yasui, Masaki Murobayashi, Koichiro Harada, Tadashi Terasaki | 2025-01-14 |
| 12154826 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Katsunori FUNAKI, Tatsushi UEDA, Yasutoshi TSUBOTA, Yuichiro TAKESHIMA, Hiroto IGAWA +1 more | 2024-11-26 |
| 12106998 | Substrate processing apparatus, substrate processing method, non-transitory computer-readable recording medium and method of manufacturing semiconductor device | Naofumi Ohashi, Teruo Yoshino | 2024-10-01 |
| 12040161 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yasutoshi TSUBOTA, Katsunori FUNAKI, Tatsushi UEDA, Eiko TAKAMI, Yuichiro TAKESHIMA +3 more | 2024-07-16 |
| 11905596 | Method of manufacturing semiconductor device, and recording medium | Teruo Yoshino, Takeshi Yasui, Masaki Murobayashi, Koichiro Harada, Tadashi Terasaki | 2024-02-20 |
| 11908682 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Hiroto IGAWA, Katsunori FUNAKI, Tatsushi UEDA, Yasutoshi TSUBOTA, Eiko TAKAMI +2 more | 2024-02-20 |
| 11726456 | Substrate processing system | Tsukasa Kamakura | 2023-08-15 |
| 11664275 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Katsunori FUNAKI, Tatsushi UEDA, Yasutoshi TSUBOTA, Yuichiro TAKESHIMA, Hiroto IGAWA +1 more | 2023-05-30 |
| 11384431 | Substrate processing apparatus | Takeshi Yasui, Masaki Murobayashi, Teruo Yoshino | 2022-07-12 |
| 11189483 | Method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Yuichiro TAKESHIMA, Katsunori FUNAKI, Yasutoshi TSUBOTA, Hiroto IGAWA | 2021-11-30 |
| 11155922 | Method of manufacturing semiconductor device, and recording medium | Teruo Yoshino, Takeshi Yasui, Masaki Murobayashi, Koichiro Harada, Tadashi Terasaki | 2021-10-26 |
| 11152476 | Method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Yuichiro TAKESHIMA, Hiroto IGAWA, Katsunori FUNAKI | 2021-10-19 |
| 11145491 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Masaki Murobayashi, Koichiro Harada, Hiroto IGAWA, Teruo Yoshino | 2021-10-12 |
| 11081362 | Method of manufacturing semiconductor device, and recording medium | Yuki YAMAKADO, Katsunori FUNAKI, Tatsushi UEDA, Yasutoshi TSUBOTA, Eiko TAKAMI +2 more | 2021-08-03 |
| 10910214 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Masaya NAGATO, Tatsuru Matsuoka, Hiroki Tamashita, Takafumi Nitta +1 more | 2021-02-02 |
| 10796900 | Method of manufacturing semiconductor device | Yuichiro TAKESHIMA, Katsunori FUNAKI, Yasutoshi TSUBOTA, Hiroto IGAWA | 2020-10-06 |
| 10671056 | Substrate processing system | Tsukasa Kamakura | 2020-06-02 |
| 10453676 | Semiconductor device manufacturing method and recording medium | — | 2019-10-22 |
| 10355098 | Method of manufacturing semiconductor device | Motomu DEGAI, Kazuhiro Harada, Masahito Kitamura | 2019-07-16 |
| 10090322 | Method of manufacturing semiconductor device | Satoshi Shimamoto, Toshiyuki Kikuchi, Atsushi Moriya, Takashi Nakagawa | 2018-10-02 |
| 9978653 | Method of manufacturing semiconductor device | Tadashi Terasaki | 2018-05-22 |
| 9966238 | Method for manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | — | 2018-05-08 |
| 9929005 | Method of manufacturing semiconductor device | Satoshi Shimamoto, Teruo Yoshino, Tadashi Terasaki | 2018-03-27 |
| 9831249 | Method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Hiroto IGAWA | 2017-11-28 |
| 9735068 | Method of manufacturing semiconductor device | Naofumi Ohashi, Atsuhiko Suda, Kazuyuki Toyoda, Shun MATSUI | 2017-08-15 |