Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9431220 | Substrate processing apparatus and substrate processing system | Naofumi Ohashi, Atsuhiko Suda, Kazuyuki Toyoda, Shun MATSUI | 2016-08-30 |
| 9059229 | Substrate processing apparatus and method of manufacturing semiconductor device | Tadashi Terasaki, Mitsunori Takeshita, Katsunori FUNAKI | 2015-06-16 |
| 7795156 | Producing method of semiconductor device | Tadashi Terasaki, Akito Hirano, Unryu Ogawa | 2010-09-14 |
| 7073445 | Illuminating device for a scanner, and a print reading apparatus using the same | Takaharu Yamamoto | 2006-07-11 |
| 6817264 | Parking brake operating device for vehicle | Tetsuo Hiura | 2004-11-16 |
| 6198070 | Laser beam machining method and laser beam machine | — | 2001-03-06 |