Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11075114 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | — | 2021-07-27 |
| 11047048 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Hiroaki Hiramatsu, Tetsuya Takahashi | 2021-06-29 |
| 10584419 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Hiroaki Hiramatsu, Tetsuya Takahashi | 2020-03-10 |
| 10388762 | Method of manufacturing semiconductor device | Hiroshi Ashihara | 2019-08-20 |
| 10355098 | Method of manufacturing semiconductor device | Motomu DEGAI, Masanori NAKAYAMA, Kazuhiro Harada | 2019-07-16 |
| 9761456 | Method of manufacturing semiconductor device and substrate processing apparatus | Kimihiko NAKATANI, Kazuhiro Harada | 2017-09-12 |
| 9735007 | Method of processing substrate, substrate processing apparatus, and recording medium | Takahiro Morikawa | 2017-08-15 |
| 9368358 | Method of manufacturing a semiconductor device | Kazuhiro Harada, Arito OGAWA, Motomu DEGAI, Hiroshi Ashihara | 2016-06-14 |
| 9024284 | Superlattice phase change memory including Sb2Te3 layers containing Zr | Takasumi Oyanagi, Norikatsu Takaura, Mitsuharu Tai, Masaharu Kinoshita, Takahiro Morikawa +1 more | 2015-05-05 |
| 8685866 | Method of manufacturing semiconductor device and substrate processing apparatus | Sadayoshi Horii, Atsushi Sano, Yoshitake Kato | 2014-04-01 |