Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400874 | Processing method, method of manufacturing semiconductor device, processing apparatus, and recording medium | Kimihiko NAKATANI, Takashi Nakagawa, Takayuki Waseda, Yoshitomo HASHIMOTO | 2025-08-26 |
| 12381091 | Method of processing substrate, method of manufacturing semiconductor device, recording medium, and substrate processing apparatus | Kimihiko NAKATANI, Ryota Ueno, Takashi Nakagawa, Yoshitomo HASHIMOTO, Yoshiro Hirose | 2025-08-05 |
| 12374544 | Processing method, method of manufacturing semiconductor device, processing apparatus, and recording medium | Shoma Miyata, Kimihiko NAKATANI, Takayuki Waseda, Takashi Nakagawa | 2025-07-29 |
| 12283476 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Hiroshi Ashihara, Takayuki Waseda | 2025-04-22 |
| 12278103 | Method of processing substrate and method of manufacturing semiconductor device by forming film | Takayuki Waseda, Takashi Nakagawa, Kimihiko NAKATANI, Takao Izaki, Yoshitomo HASHIMOTO | 2025-04-15 |
| 12176216 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kimihiko NAKATANI, Hiroshi Ashihara | 2024-12-24 |
| 12033852 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takayuki Waseda, Takashi Nakagawa, Kimihiko NAKATANI, Yoshitomo HASHIMOTO | 2024-07-09 |
| 11923193 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kimihiko NAKATANI | 2024-03-05 |
| 11923191 | Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus, and recording medium | Shoma Miyata, Kimihiko NAKATANI, Takayuki Waseda, Takashi Nakagawa | 2024-03-05 |
| 11894239 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kimihiko NAKATANI, Takashi Nakagawa, Takayuki Waseda, Yoshitomo HASHIMOTO | 2024-02-06 |
| 11848203 | Methods of processing substrate and manufacturing semiconductor device by forming film, substrate processing apparatus, and recording medium | Takayuki Waseda, Takashi Nakagawa, Kimihiko NAKATANI, Takao Izaki, Yoshitomo HASHIMOTO | 2023-12-19 |
| 11705326 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kimihiko NAKATANI, Hiroshi Ashihara, Kenji Kameda | 2023-07-18 |
| 11699593 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium | Kimihiko NAKATANI, Ryota Ueno, Takashi Nakagawa, Yoshitomo HASHIMOTO, Yoshiro Hirose | 2023-07-11 |
| 11562905 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Hiroshi Ashihara | 2023-01-24 |
| 11417518 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takayuki Waseda, Takashi Nakagawa, Kimihiko NAKATANI, Yoshitomo HASHIMOTO | 2022-08-16 |
| 11335554 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takashi Nakagawa, Takayuki Waseda, Kimihiko NAKATANI | 2022-05-17 |
| 11315800 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kimihiko NAKATANI, Takashi Nakagawa, Takayuki Waseda, Yoshitomo HASHIMOTO | 2022-04-26 |
| 11152215 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Kimihiko NAKATANI, Hiroshi Ashihara | 2021-10-19 |
| 11004676 | Method for manufacturing semiconductor device, non-transitory computer-readable recording medium, and substrate processing apparatus | Arito OGAWA, Yukinao KAGA, Kazuhiro Harada | 2021-05-11 |
| 10355098 | Method of manufacturing semiconductor device | Masanori NAKAYAMA, Kazuhiro Harada, Masahito Kitamura | 2019-07-16 |
| 9984887 | Method of manufacturing a semiconductor device | — | 2018-05-29 |
| 9368358 | Method of manufacturing a semiconductor device | Kazuhiro Harada, Arito OGAWA, Masahito Kitamura, Hiroshi Ashihara | 2016-06-14 |