Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12381091 | Method of processing substrate, method of manufacturing semiconductor device, recording medium, and substrate processing apparatus | Kimihiko NAKATANI, Motomu DEGAI, Takashi Nakagawa, Yoshitomo HASHIMOTO, Yoshiro Hirose | 2025-08-05 |
| 11699593 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium | Kimihiko NAKATANI, Motomu DEGAI, Takashi Nakagawa, Yoshitomo HASHIMOTO, Yoshiro Hirose | 2023-07-11 |