Issued Patents All Time
Showing 1–25 of 63 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12327755 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Naofumi Ohashi, Tadashi Takasaki | 2025-06-10 |
| 12327720 | Method of processing substrate, substrate processing apparatus, recording medium, and manufacturing semiconductor device | Naofumi Ohashi | 2025-06-10 |
| 12224185 | Method of manufacturing semiconductor device | Hideharu Itatani, Naofumi Ohashi | 2025-02-11 |
| 12198929 | Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium | Hiroshi Ashihara | 2025-01-14 |
| 12136545 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Takashi Yahata | 2024-11-05 |
| 12093021 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Naofumi Ohashi, Shun MATSUI, Tadashi Takasaki | 2024-09-17 |
| 11990347 | Method of manufacturing semiconductor device | Takashi Yahata | 2024-05-21 |
| 11885399 | Power transmission device | Yuu Yaguchi, Toshiaki Komatsu, Masato Horiguchi | 2024-01-30 |
| 11854799 | Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium | Hiroshi Ashihara | 2023-12-26 |
| 11747789 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Naofumi Ohashi, Shun MATSUI, Tadashi Takasaki | 2023-09-05 |
| 11728183 | Method of manufacturing semiconductor device | Hideharu Itatani, Naofumi Ohashi | 2023-08-15 |
| 11600488 | Method of manufacturing semiconductor device | Naofumi Ohashi | 2023-03-07 |
| 11322370 | Method of manufacturing semiconductor device | Hideharu Itatani, Naofumi Ohashi | 2022-05-03 |
| 11314234 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Naofumi Ohashi, Shun MATSUI, Tadashi Takasaki | 2022-04-26 |
| 11170996 | Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium | Hiroshi Ashihara | 2021-11-09 |
| 11037823 | Method of manufacturing semiconductor device | Tsuyoshi Takeda, Naofumi Ohashi | 2021-06-15 |
| 10503152 | Method of manufacturing semiconductor device | Naofumi Ohashi, Shun MATSUI, Tadashi Takasaki | 2019-12-10 |
| 10340237 | Method of manufacturing semiconductor device | Hideharu Itatani, Naofumi Ohashi | 2019-07-02 |
| 10128128 | Method of manufacturing semiconductor device having air gap between wirings for low dielectric constant | Tsuyoshi Takeda, Hiroshi Ashihara, Naofumi Ohashi | 2018-11-13 |
| 10090322 | Method of manufacturing semiconductor device | Satoshi Shimamoto, Atsushi Moriya, Masanori NAKAYAMA, Takashi Nakagawa | 2018-10-02 |
| 9991179 | Method of manufacturing semiconductor device | Naofumi Ohashi, Kazuyuki Toyoda, Satoshi Shimamoto | 2018-06-05 |
| 9728431 | Method of manufacturing semiconductor device | Naofumi Ohashi, Shun MATSUI, Tadashi Takasaki | 2017-08-08 |
| 9698050 | Method of manufacturing semiconductor device | Hiroshi Ashihara, Naofumi Ohashi, Tsuyoshi Takeda | 2017-07-04 |
| 9666494 | Method of manufacturing semiconductor device | Atsuhiko Suda, Kazuyuki Toyoda | 2017-05-30 |
| 9559022 | Method of manufacturing semiconductor device | Tsuyoshi Takeda | 2017-01-31 |