Issued Patents All Time
Showing 1–25 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424409 | Substrate processing apparatus, substrate processing method, method of manufacturing semiconductor device, and non-transitory computer-readable recording medium | Naofumi Ohashi, Tadashi Takasaki | 2025-09-23 |
| 12387949 | Substrate processing apparatus | Naofumi Ohashi, Tadashi Takasaki | 2025-08-12 |
| 12320778 | Method of processing substrate, substrate processing apparatus, method of manufacturing semiconductor processing apparatus, and recording medium | Naofumi Ohashi, Toshiro Koshimaki | 2025-06-03 |
| 12195854 | Substrate processing apparatus, method of processing substrate, method of manufacturing semiconductor device, and recording medium | Takeshi Yasui, Masaki Murobayashi, Koichiro Harada, Tadashi Terasaki, Masanori NAKAYAMA | 2025-01-14 |
| 12106998 | Substrate processing apparatus, substrate processing method, non-transitory computer-readable recording medium and method of manufacturing semiconductor device | Naofumi Ohashi, Masanori NAKAYAMA | 2024-10-01 |
| 11967513 | Substrate processing apparatus | Naofumi Ohashi, Tadashi Takasaki | 2024-04-23 |
| 11923173 | Substrate processing apparatus, substrate processing method, method of manufacturing semiconductor device, and non-transitory computer-readable recording medium | Naofumi Ohashi, Tadashi Takasaki | 2024-03-05 |
| 11905596 | Method of manufacturing semiconductor device, and recording medium | Takeshi Yasui, Masaki Murobayashi, Koichiro Harada, Tadashi Terasaki, Masanori NAKAYAMA | 2024-02-20 |
| 11841343 | Method of processing substrate, substrate processing apparatus, method of manufacturing semiconductor processing apparatus, and recording medium | Naofumi Ohashi, Toshiro Koshimaki | 2023-12-12 |
| 11538661 | Substrate processing apparatus | Naofumi Ohashi, Tadashi Takasaki | 2022-12-27 |
| 11495435 | Substrate processing apparatus, non-transitory computer-readable recording medium, method of manufacturing semiconductor device, and a substrate processing method | Takashi Yahata | 2022-11-08 |
| 11384431 | Substrate processing apparatus | Masanori NAKAYAMA, Takeshi Yasui, Masaki Murobayashi | 2022-07-12 |
| 11271508 | Power conversion device, motor driving system, and control method | Naoto NIIMURA | 2022-03-08 |
| 11155922 | Method of manufacturing semiconductor device, and recording medium | Takeshi Yasui, Masaki Murobayashi, Koichiro Harada, Tadashi Terasaki, Masanori NAKAYAMA | 2021-10-26 |
| 11145491 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Masaki Murobayashi, Koichiro Harada, Hiroto IGAWA, Masanori NAKAYAMA | 2021-10-12 |
| 10938297 | AC-DC conversion device and method for controlling same by controlling the timing of multiple switch portions | Keisuke Hattori, Tomohisa Okami | 2021-03-02 |
| 10934622 | Substrate processing apparatus | Naofumi Ohashi, Tadashi Takasaki, Shun MATSUI | 2021-03-02 |
| 10581338 | Power supply system | Atsuo Kawamura, Mohammad Bani Shamseh | 2020-03-03 |
| 10404157 | AC-DC conversion device and method for controlling same by controlling the timing of multiple switch portions | Keisuke Hattori, Tomohisa Okami | 2019-09-03 |
| 9929005 | Method of manufacturing semiconductor device | Satoshi Shimamoto, Tadashi Terasaki, Masanori NAKAYAMA | 2018-03-27 |
| 9870964 | Method of manufacturing semiconductor device by determining and selecting cooling recipe based on temperature | Takeshi Yasui | 2018-01-16 |
| 9472424 | Substrate processing apparatus and a method of manufacturing a semiconductor device | Katsuyoshi Hamano, Yasutoshi TSUBOTA, Masayuki Tomita | 2016-10-18 |
| 9236246 | Substrate processing apparatus and a method of manufacturing a semiconductor device | Katsuyoshi Hamano, Yasutoshi TSUBOTA, Masayuki Tomita | 2016-01-12 |
| 8443484 | Substrate processing apparatus | Yukio Ozaki, Satoru Takahata, Reizo Nunozawa | 2013-05-21 |
| 7767053 | Substrate processing apparatus and substrate processing method | Tomohiko Takeda, Ken Sugihara, Katsuyoshi Hamano, Nobuo Ishimaru | 2010-08-03 |