Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9437465 | Substrate processing apparatus and method of manufacturing semiconductor device | Satoru Takahata, Yukio Ozaki | 2016-09-06 |
| 8904955 | Substrate processing apparatus | Makoto Nomura, Yukio Ozaki, Satoru Takahata | 2014-12-09 |
| 8443484 | Substrate processing apparatus | Yukio Ozaki, Teruo Yoshino, Satoru Takahata | 2013-05-21 |