Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11521880 | Substrate processing apparatus and recording medium for changing atmosphere of transfer chamber | Ichiro NUNOMURA, Tsukasa Iida, Hitoshi Sekihara, Kazunori Tsutsuguchi, Jin SHIBATA | 2022-12-06 |
| 10452856 | Processing apparatus, controller and processing system | Ichiro NUNOMURA, Hiroyuki Iwakura | 2019-10-22 |
| 9437465 | Substrate processing apparatus and method of manufacturing semiconductor device | Yukio Ozaki, Reizo Nunozawa | 2016-09-06 |
| 9092894 | Display control device and display control program for grouping related items based upon location | Kouichi Kawamoto | 2015-07-28 |
| 8904955 | Substrate processing apparatus | Makoto Nomura, Yukio Ozaki, Reizo Nunozawa | 2014-12-09 |
| 8457774 | Substrate processing apparatus, control method of the substrate processing apparatus, manufacturing method of semiconductor device and apparatus state shifting method | Yukio Ozaki, Ichiro NUNOMURA | 2013-06-04 |
| 8443484 | Substrate processing apparatus | Yukio Ozaki, Teruo Yoshino, Reizo Nunozawa | 2013-05-21 |
| 4551211 | Aqueous anodizing solution and process for coloring article of magnesium or magnesium-base alloy | Waichi Kobayashi | 1985-11-05 |