Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11521880 | Substrate processing apparatus and recording medium for changing atmosphere of transfer chamber | Satoru Takahata, Tsukasa Iida, Hitoshi Sekihara, Kazunori Tsutsuguchi, Jin SHIBATA | 2022-12-06 |
| 10452856 | Processing apparatus, controller and processing system | Satoru Takahata, Hiroyuki Iwakura | 2019-10-22 |
| 8457774 | Substrate processing apparatus, control method of the substrate processing apparatus, manufacturing method of semiconductor device and apparatus state shifting method | Yukio Ozaki, Satoru Takahata | 2013-06-04 |