Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11521880 | Substrate processing apparatus and recording medium for changing atmosphere of transfer chamber | Satoru Takahata, Ichiro NUNOMURA, Tsukasa Iida, Hitoshi Sekihara, Jin SHIBATA | 2022-12-06 |
| 6194037 | Method of plasma processing a substrate placed on a substrate table | Masato Terasaki | 2001-02-27 |