Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11521880 | Substrate processing apparatus and recording medium for changing atmosphere of transfer chamber | Satoru Takahata, Ichiro NUNOMURA, Hitoshi Sekihara, Kazunori Tsutsuguchi, Jin SHIBATA | 2022-12-06 |
| 9595460 | Substrate processing apparatus, recording medium and method of manufacturing semiconductor device | — | 2017-03-14 |
| 8482426 | Substrate processing apparatus | Akihiko Yoneda, Kaori Inoshima | 2013-07-09 |
| 8417394 | Substrate processing apparatus, semiconductor device manufacturing method and temperature controlling method | Masashi Sugishita, Masaaki Ueno, Susumu NISHIURA, Masao Aoyama, Kenichi Fujimoto +2 more | 2013-04-09 |
| 7808396 | Substrate processing apparatus | Akihiko Yoneda, Kaori Inoshima | 2010-10-05 |
| 6335599 | Actuator for a drive mode shifting device | Noriaki Nonaka, Mutsuroh Aoyama | 2002-01-01 |
| 5580443 | Process for cracking low-quality feed stock and system used for said process | Masahiko Yoshida, Yutaka Kitayama | 1996-12-03 |
| 5062948 | Mercury removal from liquid hydrocarbon compound | Tetsu Kawazoe | 1991-11-05 |