Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10131992 | Substrate processing apparatus, method of controlling substrate processing apparatus, method of maintaining substrate processing apparatus, and recording medium | Kaori Inoshima, Hiroyuki Mitsui, Hiroshi Ekko | 2018-11-20 |
| 9690879 | Substrate processing apparatus, method of manufacturing semiconductor device, and method of generating recipe | Hiroyuki Mitsui, Hiroshi Ekko, Kaori Inoshima, Kazuo NAKAYA, Osamu Morita | 2017-06-27 |
| 8417394 | Substrate processing apparatus, semiconductor device manufacturing method and temperature controlling method | Masashi Sugishita, Masaaki Ueno, Tsukasa Iida, Masao Aoyama, Kenichi Fujimoto +2 more | 2013-04-09 |