Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8417394 | Substrate processing apparatus, semiconductor device manufacturing method and temperature controlling method | Masashi Sugishita, Masaaki Ueno, Tsukasa Iida, Susumu NISHIURA, Kenichi Fujimoto +2 more | 2013-04-09 |
| 7605405 | Semiconductor light emitting device having first and second resins | Mitsunori Harada, Kazuhiko Ueno, Takashi Ebisutani, Kaori Tachibana | 2009-10-20 |