Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12293930 | Substrate processing apparatus, method of manufacturing semiconductor device and heater | Shinobu Sugiura, Masaaki Ueno, Tetsuya Kosugi, Hitoshi Murata, Tomoyuki Yamada | 2025-05-06 |
| 12085338 | Heater, temperature control system, and processing apparatus | Tetsuya Kosugi, Masaaki Ueno, Shinobu Sugiura | 2024-09-10 |
| 11761087 | Substrate processing apparatus and non-transitory computer-readable recording medium | Masaaki Ueno | 2023-09-19 |
| 11316178 | Checking method of resin-framed membrane electrode assembly | Suguru Ohmori, Seiji Sugiura | 2022-04-26 |
| 11158529 | Method of manufacturing semiconductor device, method of controlling temperature and non-transitory computer-readable recording medium | Hideto Yamaguchi | 2021-10-26 |
| 10658683 | Method for producing electrolyte membrane electrode assembly for fuel cells | Daisuke Okonogi, Yoshihito Kimura, Yukihito Tanaka | 2020-05-19 |
| 10381661 | Resin frame equipped membrane electrode assembly for fuel cell | Suguru Ohmori, Takashi Kato, Yukihito Tanaka, Seiji Sugiura | 2019-08-13 |
| 10141592 | Resin-framed membrane electrode assembly for fuel cell | Seiji Sugiura, Yoshihito Kimura, Naoki Mitsuta, Kenichi Tanaka, Yukihito Tanaka | 2018-11-27 |
| D819463 | Protector tube for thermocouple | Tokunobu Akao, Atushi Umekawa, Masaaki Ueno, Tetsuya Kosugi, Hitoshi Murata +1 more | 2018-06-05 |
| D818850 | Protector tube for thermocouple | Tokunobu Akao, Atushi Umekawa, Masaaki Ueno, Tetsuya Kosugi, Hitoshi Murata +1 more | 2018-05-29 |
| 9966623 | Electrolyte membrane-electrode structure with resin frame for fuel cells | Yukihito Tanaka, Kazuo Nunokawa, Hiroshi Sohma, Kenichi Tanaka, Naoki Mitsuta +1 more | 2018-05-08 |
| D803075 | Thermometry tool for substrate processing apparatus | Tokunobu Akao, Motoya Takewaki, Akihiro Osaka, Masaaki Ueno, Tetsuya Kosugi | 2017-11-21 |
| 9695511 | Substrate processing apparatus, method of manufacturing semiconductor device and method of processing substrate | Hitoshi Murata, Tetsuya Kosugi, Masaaki Ueno | 2017-07-04 |
| 9577276 | Fuel cell membrane electrode assembly | Naoki Mitsuta, Yukihito Tanaka, Hiroshi Sohma, Kenichi Tanaka, Masahiro Fukuta | 2017-02-21 |
| 9418881 | Substrate processing apparatus capable of switching control mode of heater | Shinobu Sugiura, Masaaki Ueno, Kazuo Tanaka, Hideto Yamaguchi, Kenji Shirako | 2016-08-16 |
| 9331346 | Fuel cell resin frame equipped membrane electrode assembly | Yukihito Tanaka, Naoki Mitsuta | 2016-05-03 |
| 9184069 | Heating apparatus, substrate processing apparatus employing the same, method of manufacturing semiconductor devices, and insulator | Akira Hayashida, Masaaki Ueno, Masakazu Shimada, Toshimitsu Miyata, Kimio Kitamura +2 more | 2015-11-10 |
| 8417394 | Substrate processing apparatus, semiconductor device manufacturing method and temperature controlling method | Masaaki Ueno, Tsukasa Iida, Susumu NISHIURA, Masao Aoyama, Kenichi Fujimoto +2 more | 2013-04-09 |
| 8367975 | Temperature adjustment method | Masaaki Ueno | 2013-02-05 |
| 8116618 | Heating apparatus, substrate processing apparatus, and method of manufacturing semiconductor devices | Akira Hayashida, Masaaki Ueno, Masakazu Shimada, Toshimitsu Miyata, Kimio Kitamura +2 more | 2012-02-14 |
| 7930059 | Temperature regulating method, thermal processing system and semiconductor device manufacturing method | Masaaki Ueno | 2011-04-19 |
| 7727780 | Substrate processing method and semiconductor manufacturing apparatus | Masaaki Ueno, Akira Hayashida | 2010-06-01 |
| 7700054 | Substrate processing apparatus having gas side flow via gas inlet | Akira Hayashida, Masaaki Ueno, Masakazu Shimada, Yukinori Aburatani, Tomoyuki Yamada +1 more | 2010-04-20 |
| 7577493 | Temperature regulating method, thermal processing system and semiconductor device manufacturing method | Masaaki Ueno | 2009-08-18 |
| 7346273 | Substrate processing equipment | Kazuo Tanaka, Masaaki Ueno | 2008-03-18 |