Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12050138 | Substrate processing apparatus, and thermocouple | Hideto Yamaguchi, Tetsuya Kosugi, Tokunobu Akao, Atsushi UMEKAWA, Motoya Takewaki | 2024-07-30 |
| 11300456 | Substrate processing apparatus, and thermocouple | Hideto Yamaguchi, Tetsuya Kosugi, Tokunobu Akao, Atsushi UMEKAWA, Motoya Takewaki | 2022-04-12 |
| 10684174 | Substrate processing apparatus, and thermocouple | Hideto Yamaguchi, Tetsuya Kosugi, Tokunobu Akao, Atsushi UMEKAWA, Motoya Takewaki | 2020-06-16 |
| 10228291 | Substrate processing apparatus, and thermocouple | Hideto Yamaguchi, Tetsuya Kosugi, Tokunobu Akao, Atsushi UMEKAWA, Motoya Takewaki | 2019-03-12 |
| D803075 | Thermometry tool for substrate processing apparatus | Tokunobu Akao, Motoya Takewaki, Masaaki Ueno, Tetsuya Kosugi, Masashi Sugishita | 2017-11-21 |
| D790490 | Reaction tube | Hideto Yamaguchi, Motoya Takewaki | 2017-06-27 |
| D786951 | Reaction tube | Hideto Yamaguchi, Motoya Takewaki | 2017-05-16 |
| D780606 | Protector tube for thermocouple | Hideto Yamaguchi, Moyota Takewaki | 2017-03-07 |
| D778742 | Protector tube for thermocouple | Hideto Yamaguchi, Motoya Takewaki | 2017-02-14 |
| D778741 | Protector tube for thermocouple | Hideto Yamaguchi, Motoya Takewaki | 2017-02-14 |
| 9509966 | Projector in illumination optical system including phosphor wheel driver | Hiroyuki Saitou, Atsushi Katou, Motoyasu Utsunomiya, Masateru Matsubara | 2016-11-29 |
| 9453999 | Phosphor color wheel and projection display device including same | — | 2016-09-27 |
| 9411219 | Excitation light synthesizing unit, light source unit, and projection-type display apparatus | — | 2016-08-09 |
| 9022580 | Illumination optical system and projector using the same | Hiroyuki Saitou, Atsushi Katou, Motoyasu Utsunomiya, Masateru Matsubara | 2015-05-05 |
| 8936368 | Illumination optical system and projector using the same | Hiroyuki Saitou, Atsushi Katou, Motoyasu Utsunomiya, Masateru Matsubara | 2015-01-20 |
| 8485669 | Projector and illumination apparatus for same | Atsushi Katou, Motoyasu Utsunomiya, Hiroyuki Saitou, Masateru Matsubara | 2013-07-16 |
| 7448755 | Three-panel projection display apparatus for displaying color images | — | 2008-11-11 |
| 7252384 | Three-panel projection display apparatus for displaying color images | — | 2007-08-07 |
| 6658321 | Substrate processing method and apparatus | Masaki Murobayashi, Tatsuhisa Matsunaga, Kouichi Noto | 2003-12-02 |
| 6481852 | Projector apparatus comprising a light composing optical system vertically stacked with respect to a light separation optical system | — | 2002-11-19 |
| 6368049 | Semiconductor manufacturing method and semiconductor manufacturing apparatus | Hiroshi Sekiyama, Kouichi Noto, Masaki Sugawara | 2002-04-09 |
| 5889630 | High density magnetic recorder | Hiro Karube | 1999-03-30 |