Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE43023 | Dual loading port semiconductor processing equipment | Takanobu Nakashima, Hidehiro Yanagawa | 2011-12-13 |
| 7198447 | Semiconductor device producing apparatus and producing method of semiconductor device | Kazuhiro Morimitsu, Masanori Kaneko, Kouichi Noto, Hidehiro Yanagawa, Masaki Matsushima | 2007-04-03 |
| 6927165 | Method and apparatus for processing substrates and method for manufacturing a semiconductor device | Masahiro Teramoto, Norio Akutsu, Kouichi Noto | 2005-08-09 |
| 6737613 | Heat treatment apparatus and method for processing substrates | Takatomo Yamaguchi, Kazuhiro Morimitsu | 2004-05-18 |
| 6658321 | Substrate processing method and apparatus | Akihiro Osaka, Masaki Murobayashi, Kouichi Noto | 2003-12-02 |
| 6641350 | Dual loading port semiconductor processing equipment | Takanobu Nakashima, Hidehiro Yanagawa | 2003-11-04 |
| 6638860 | Method and apparatus for processing substrates and method for manufacturing a semiconductor device | Masahiro Teramoto, Norio Akutsu, Kouichi Noto | 2003-10-28 |
| 6540469 | Substrate processing apparatus | Kouichi Noto | 2003-04-01 |
| 5371931 | Production system for molded and pressed parts | Takeshi Kawana, Toshiyuki Amimoto, Yasuhiro Fujita, Yuuji Enomoto, Tatsuya Niinomi +4 more | 1994-12-13 |