Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7198447 | Semiconductor device producing apparatus and producing method of semiconductor device | Kazuhiro Morimitsu, Tatsuhisa Matsunaga, Masanori Kaneko, Hidehiro Yanagawa, Masaki Matsushima | 2007-04-03 |
| 6927165 | Method and apparatus for processing substrates and method for manufacturing a semiconductor device | Tatsuhisa Matsunaga, Masahiro Teramoto, Norio Akutsu | 2005-08-09 |
| 6658321 | Substrate processing method and apparatus | Akihiro Osaka, Masaki Murobayashi, Tatsuhisa Matsunaga | 2003-12-02 |
| 6638860 | Method and apparatus for processing substrates and method for manufacturing a semiconductor device | Tatsuhisa Matsunaga, Masahiro Teramoto, Norio Akutsu | 2003-10-28 |
| 6540469 | Substrate processing apparatus | Tatsuhisa Matsunaga | 2003-04-01 |
| 6368049 | Semiconductor manufacturing method and semiconductor manufacturing apparatus | Akihiro Osaka, Hiroshi Sekiyama, Masaki Sugawara | 2002-04-09 |