Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12249485 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Takeshi Yasui, Katsunori FUNAKI, Koichiro Harada | 2025-03-11 |
| 12230474 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Takeshi Yasui, Tetsuaki INADA | 2025-02-18 |
| 12195854 | Substrate processing apparatus, method of processing substrate, method of manufacturing semiconductor device, and recording medium | Teruo Yoshino, Takeshi Yasui, Koichiro Harada, Tadashi Terasaki, Masanori NAKAYAMA | 2025-01-14 |
| 11905596 | Method of manufacturing semiconductor device, and recording medium | Teruo Yoshino, Takeshi Yasui, Koichiro Harada, Tadashi Terasaki, Masanori NAKAYAMA | 2024-02-20 |
| 11837440 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Takeshi Yasui, Katsunori FUNAKI, Koichiro Harada | 2023-12-05 |
| 11384431 | Substrate processing apparatus | Masanori NAKAYAMA, Takeshi Yasui, Teruo Yoshino | 2022-07-12 |
| 11155922 | Method of manufacturing semiconductor device, and recording medium | Teruo Yoshino, Takeshi Yasui, Koichiro Harada, Tadashi Terasaki, Masanori NAKAYAMA | 2021-10-26 |
| 11145491 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Koichiro Harada, Hiroto IGAWA, Teruo Yoshino, Masanori NAKAYAMA | 2021-10-12 |
| 6658321 | Substrate processing method and apparatus | Akihiro Osaka, Tatsuhisa Matsunaga, Kouichi Noto | 2003-12-02 |