Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE43023 | Dual loading port semiconductor processing equipment | Takanobu Nakashima, Tatsuhisa Matsunaga | 2011-12-13 |
| 7198447 | Semiconductor device producing apparatus and producing method of semiconductor device | Kazuhiro Morimitsu, Tatsuhisa Matsunaga, Masanori Kaneko, Kouichi Noto, Masaki Matsushima | 2007-04-03 |
| 6641350 | Dual loading port semiconductor processing equipment | Takanobu Nakashima, Tatsuhisa Matsunaga | 2003-11-04 |
| 5902103 | Vertical furnace of a semiconductor manufacturing apparatus and a boat cover thereof | Kiyohiko Maeda, Satoshi Kakizaki, Tomoshi Taniyama, Ken Suzaki | 1999-05-11 |
| 5277215 | Method for supplying and discharging gas to and from semiconductor manufacturing equipment and system for executing the same | Hiroyuki Nishiuchi, Masakazu Shimada, Mitsuhiro Hirano, Tomoshi Taniyama, Kazumi Nikaido +2 more | 1994-01-11 |