Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12050138 | Substrate processing apparatus, and thermocouple | Akihiro Osaka, Hideto Yamaguchi, Tetsuya Kosugi, Tokunobu Akao, Atsushi UMEKAWA | 2024-07-30 |
| 11913116 | Substrate processing apparatus and method of manufacturing semiconductor device | Tomoshi Taniyama | 2024-02-27 |
| 11300456 | Substrate processing apparatus, and thermocouple | Akihiro Osaka, Hideto Yamaguchi, Tetsuya Kosugi, Tokunobu Akao, Atsushi UMEKAWA | 2022-04-12 |
| 10684174 | Substrate processing apparatus, and thermocouple | Akihiro Osaka, Hideto Yamaguchi, Tetsuya Kosugi, Tokunobu Akao, Atsushi UMEKAWA | 2020-06-16 |
| 10415136 | Substrate processing apparatus including heating and cooling device, and ceiling part included in the same | Tetsuya Kosugi, Masaaki Ueno | 2019-09-17 |
| 10340151 | Substrate processing apparatus, heating apparatus, ceiling heat insulator, and method of manufacturing semiconductor device | Tetsuya Kosugi, Masaaki Ueno, Hitoshi Murata | 2019-07-02 |
| 10228291 | Substrate processing apparatus, and thermocouple | Akihiro Osaka, Hideto Yamaguchi, Tetsuya Kosugi, Tokunobu Akao, Atsushi UMEKAWA | 2019-03-12 |
| D824440 | Heater of substrate processing apparatus | Tetsuya Kosugi | 2018-07-31 |
| D823363 | Heater of substrate processing apparatus | Tetsuya Kosugi | 2018-07-17 |
| D803075 | Thermometry tool for substrate processing apparatus | Tokunobu Akao, Akihiro Osaka, Masaaki Ueno, Tetsuya Kosugi, Masashi Sugishita | 2017-11-21 |
| D790490 | Reaction tube | Akihiro Osaka, Hideto Yamaguchi | 2017-06-27 |
| D786951 | Reaction tube | Akihiro Osaka, Hideto Yamaguchi | 2017-05-16 |
| 9587884 | Insulation structure and method of manufacturing semiconductor device | Tetsuya Kosugi, Hitoshi Murata, Masaaki Ueno | 2017-03-07 |
| D778742 | Protector tube for thermocouple | Akihiro Osaka, Hideto Yamaguchi | 2017-02-14 |
| D778741 | Protector tube for thermocouple | Akihiro Osaka, Hideto Yamaguchi | 2017-02-14 |