Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9184069 | Heating apparatus, substrate processing apparatus employing the same, method of manufacturing semiconductor devices, and insulator | Akira Hayashida, Masaaki Ueno, Masakazu Shimada, Masashi Sugishita, Kimio Kitamura +2 more | 2015-11-10 |
| 9111972 | Substrate processing apparatus and manufacturing method for a semiconductor device | Mitsunori Takeshita, Tomoyuki Matsuda, Mitsuhiro Hirano, Akihiro Sato, Shinya Morita +1 more | 2015-08-18 |
| 8906161 | Semiconductor producing device and semiconductor device producing method | Katsuhisa Kasanami, Mitsunori Ishisaka | 2014-12-09 |
| 8197638 | Semiconductor manufacturing device and method for manufacturing semiconductor devices | Mitsunori Ishisaka | 2012-06-12 |
| 8116618 | Heating apparatus, substrate processing apparatus, and method of manufacturing semiconductor devices | Akira Hayashida, Masaaki Ueno, Masakazu Shimada, Masashi Sugishita, Kimio Kitamura +2 more | 2012-02-14 |
| 7863204 | Substrate processing apparatus, heating apparatus for use in the same, method of manufacturing semiconductors with those apparatuses, and heating element supporting structure | Akira Hayashida, Masakazu Shimada, Kimio Kitamura, Kenji Tanaka | 2011-01-04 |
| 7842160 | Semiconductor producing device and semiconductor device producing method | Katsuhisa Kasanami, Mitsunori Ishisaka | 2010-11-30 |
| 6514869 | Method for use in manufacturing a semiconductor device | Tetsuya Wada, Eisuke Nishitani | 2003-02-04 |
| 6288368 | Vacuum heating furnace with tapered portion | Hiroki Kawada, Tomoji Watanabe, Nobuo Tsumaki | 2001-09-11 |
| 6093911 | Vacuum heating furnace with tapered portion | Hiroki Kawada, Tomoji Watanabe, Nobuo Tsumaki | 2000-07-25 |