Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7485874 | Apparatus for manufacturing semiconductor substrates | Seiichi Nakamura, Hideki Nishihata, Riyuusuke Kasamatsu, Kazunori Tsubuku, Akira Bando +4 more | 2009-02-03 |
| 6656838 | Process for producing semiconductor and apparatus for production | Akiko Kagatsume, Tadanori Yoshida | 2003-12-02 |
| 6518548 | Substrate temperature control system and method for controlling temperature of substrate | Masakazu Sugaya, Fumio Murai, Yutaka Kaneko, Masafumi Kanetomo, Shigeki Hirasawa +2 more | 2003-02-11 |
| 6462411 | Semiconductor wafer processing apparatus for transferring a wafer mount | Nobuyuki Mise, Toshiyuki Uchino, Norio Suzuki, Yoshihiko Sakurai, Toshiya Uenishi +3 more | 2002-10-08 |
| 6403479 | Process for producing semiconductor and apparatus for production | Akiko Kagatsume, Tadanori Yoshida | 2002-06-11 |
| 6394797 | Substrate temperature control system and method for controlling temperature of substrate | Masakazu Sugaya, Fumio Murai, Yutaka Kaneko, Masafumi Kanetomo, Shigeki Hirasawa +2 more | 2002-05-28 |
| 6288368 | Vacuum heating furnace with tapered portion | Hiroki Kawada, Nobuo Tsumaki, Toshimitsu Miyata | 2001-09-11 |
| 6093911 | Vacuum heating furnace with tapered portion | Hiroki Kawada, Nobuo Tsumaki, Toshimitsu Miyata | 2000-07-25 |
| 5235399 | Temperature measuring apparatus utilizing radiation | Tatehito Usui, Junichi Kobayashi, Takehiko Ooshima, Shunji Sasabe | 1993-08-10 |
| 5001327 | Apparatus and method for performing heat treatment on semiconductor wafers | Shigeki Hirasawa, Takuji Torii, Toshihiro Komatsu, Kazuo Honma, Akihiko Sakai +3 more | 1991-03-19 |