Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6497992 | Process for manufacturing semiconductor integrated circuit device | Takashi Yunogami, Kazuyuki Suko, Jun Abe, Takao Kumihashi, Fumio Murai | 2002-12-24 |
| 6057081 | Process for manufacturing semiconductor integrated circuit device | Takashi Yunogami, Kazuyuki Suko, Jun Abe, Takao Kumihashi, Fumio Murai | 2000-05-02 |
| 5972862 | Cleaning liquid for semiconductor devices | Yoshimi Torii, Masayuki Kojima, Kazuhisa Usuami, Takafumi Tokunaga, Kazusato Hara +8 more | 1999-10-26 |
| 5235399 | Temperature measuring apparatus utilizing radiation | Tatehito Usui, Tomoji Watanabe, Junichi Kobayashi, Takehiko Ooshima | 1993-08-10 |
| 5060045 | Semiconductor integrated circuit device and method of manufacturing the same | Nobuo Owada, Hiroyuki Akimori, Takahisa Nitta, Tohru Kobayashi, Mikinori Kawaji +1 more | 1991-10-22 |
| 5021114 | Apparatus for treating material by using plasma | Hiroshi Saito, Yasumichi Suzuki, Kazuhiro Nakajima | 1991-06-04 |
| 4717462 | Sputtering apparatus | Yoshio Homma, Sukeyoshi Tsunekawa | 1988-01-05 |