Issued Patents All Time
Showing 1–25 of 45 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8129275 | Process for manufacturing semiconductor integrated circuit device | Naofumi Ohashi, Junji Noguchi, Toshinori Imai, Hizuru Yamaguchi, Nobuo Owada +2 more | 2012-03-06 |
| 7659201 | Process for manufacturing semiconductor integrated circuit device | Naofumi Ohashi, Junji Noguchi, Toshinori Imai, Hizuru Yamaguchi, Nobuo Owada +2 more | 2010-02-09 |
| 7563716 | Polishing method | Seiichi Kondo, Noriyuki Sakuma, Kenichi Takeda, Kenji Hinode | 2009-07-21 |
| 7510970 | Process for manufacturing semiconductor integrated circuit device | Naofumi Ohashi, Junji Noguchi, Toshinori Imai, Hizuru Yamaguchi, Nobuo Owada +2 more | 2009-03-31 |
| 7279425 | Polishing method | Seiichi Kondo, Noriyuki Sakuma, Kenichi Takeda, Kenji Hinode | 2007-10-09 |
| 7183212 | Polishing method, metallization fabrication method, method for manufacturing semiconductor device and semiconductor device | Seiichi Kondo, Masaaki Fujimori, Noriyuki Sakuma | 2007-02-27 |
| 7132367 | Polishing method | Seiichi Kondo, Noriyuki Sakuma, Kenichi Takeda, Kenji Hinode | 2006-11-07 |
| 7026245 | Polishing agent and polishing method | Kikuo Kusukawa, Shigeo Moriyama, Masayuki Nagasawa | 2006-04-11 |
| 6899603 | Polishing apparatus | Seiichi Kondo, Noriyuki Sakuma, Youhei Yamada, Takeshi Kimura, Hiroki Nezu | 2005-05-31 |
| 6855035 | Apparatus and method for producing substrate with electrical wire thereon | Noriyuki Sakuma, Naofumi Ohashi, Toshinori Imai | 2005-02-15 |
| 6815357 | Process and apparatus for manufacturing a semiconductor device | Noriyuki Sakuma, Hiroshi Nakano, Takeyuki Itabashi, Haruo Akahoshi | 2004-11-09 |
| 6800557 | Process for manufacturing semiconductor integrated circuit device | Naofumi Ohashi, Junji Noguchi, Toshinori Imai, Hizuru Yamaguchi, Nobuo Owada +2 more | 2004-10-05 |
| 6774041 | Polishing method, metallization fabrication method, method for manufacturing semiconductor device and semiconductor device | Seiichi Kondo, Masaaki Fujimori, Noriyuki Sakuma | 2004-08-10 |
| 6750128 | Methods of polishing, interconnect-fabrication, and producing semiconductor devices | Seiichi Kondo, Noriyuki Sakuma | 2004-06-15 |
| 6719618 | Polishing apparatus | Seiichi Kondo, Noriyuki Sakuma, Youhei Yamada, Takeshi Kimura, Hiroki Nezu | 2004-04-13 |
| 6676496 | Apparatus for processing semiconductor wafers | Kan Yasui, Shigeo Moriyama, Katsuhiko Yamaguchi | 2004-01-13 |
| 6638854 | Semiconductor device and method for manufacturing the same | Seiichi Kondo, Noriyuki Sakuma, Naofumi Ohashi, Toshinori Imai, Hizuru Yamaguchi +1 more | 2003-10-28 |
| 6596638 | Polishing method | Seiichi Kondo, Noriyuki Sakuma, Kenichi Takeda, Kenji Hinode | 2003-07-22 |
| 6565422 | Polishing apparatus using substantially abrasive-free liquid with mixture unit near polishing unit, and plant using the polishing apparatus | Hiroki Nezu, Takeshi Kimura, Seiichi Kondo, Noriyuki Sakuma | 2003-05-20 |
| 6561875 | Apparatus and method for producing substrate with electrical wire thereon | Noriyuki Sakuma, Naofumi Ohashi, Toshinori Imai | 2003-05-13 |
| 6561883 | Method of polishing | Seiichi Kondo, Noriyuki Sakuma | 2003-05-13 |
| 6562719 | Methods of polishing, interconnect-fabrication, and producing semiconductor devices | Seiichi Kondo, Noriyuki Sakuma | 2003-05-13 |
| 6531400 | Process for manufacturing semiconductor integrated circuit device | Naofumi Ohashi, Junji Noguchi, Toshinori Imai, Hizuru Yamaguchi, Nobuo Owada +2 more | 2003-03-11 |
| 6509273 | Method for manufacturing a semiconductor device | Toshinori Imai, Naofumi Ohashi, Seiichi Kondo | 2003-01-21 |
| 6478977 | Polishing method and apparatus | Shigeo Moriyama, Katsuhiko Yamaguchi, Sunao Matsubara, Yoshihiro Ishida, Ryousei Kawa-ai | 2002-11-12 |