Issued Patents All Time
Showing 26–45 of 45 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6458674 | Process for manufacturing semiconductor integrated circuit device | Naofumi Ohashi, Junji Noguchi, Toshinori Imai, Hizuru Yamaguchi, Nobuo Owada +2 more | 2002-10-01 |
| 6376345 | Process for manufacturing semiconductor integrated circuit device | Naofumi Ohashi, Junji Noguchi, Toshinori Imai, Hizuru Yamaguchi, Nobuo Owada +2 more | 2002-04-23 |
| 6326299 | Method for manufacturing a semiconductor device | Seiichi Kondo, Noriyuki Sakuma, Naofumi Ohashi, Toshinori Imai, Hizuru Yamaguchi +1 more | 2001-12-04 |
| 6221773 | Method for working semiconductor wafer | Kan Yasui, Shigeo Moriyama, Katsuhiko Yamaguchi | 2001-04-24 |
| 6180020 | Polishing method and apparatus | Shigeo Moriyama, Katsuhiko Yamaguchi, Sunao Matsubara, Yoshihiro Ishida, Ryousei Kawa-ai | 2001-01-30 |
| 6117775 | Polishing method | Seiichi Kondo, Noriyuki Sakuma, Kenichi Takeda, Kenji Hinode | 2000-09-12 |
| 6043155 | Polishing agent and polishing method | Kikuo Kusukawa, Shigeo Moriyama, Masayuki Nagasawa | 2000-03-28 |
| 5772780 | Polishing agent and polishing method | Kikuo Kusukawa, Shigeo Moriyama, Masayuki Nagasawa | 1998-06-30 |
| 5609511 | Polishing method | Shigeo Moriyama, Yoshio Kawamura, Kikuo Kusukawa, Takeshi Furusawa | 1997-03-11 |
| 5444000 | Method of fabricating integrated circuit with improved yield rate | Norio Ohkubo, Makoto Suzuki, Katsuro Sasaki | 1995-08-22 |
| 5270259 | Method for fabricating an insulating film from a silicone resin using O.sub . | Shinichi Ito, Eiji Sasaki, Natsuki Yokoyama | 1993-12-14 |
| 5177589 | Refractory metal thin film having a particular step coverage factor and ratio of surface roughness | Nobuyoshi Kobayashi, Hidekazu Goto, Masayuki Suzuki, Natsuki Yokoyama, Yoshitaka Nakamura | 1993-01-05 |
| 5175017 | Method of forming metal or metal silicide film | Nobuyoshi Kobayashi, Hidekazu Goto, Masayuki Suzuki, Natsuki Yokoyama | 1992-12-29 |
| 4897709 | Titanium nitride film in contact hole with large aspect ratio | Natsuki Yokoyama, Kenji Hinode, Kiichiro Mukai | 1990-01-30 |
| 4842891 | Method of forming a copper film by chemical vapor deposition | Hiroshi Miyazaki, Kiichiro Mukai | 1989-06-27 |
| 4717462 | Sputtering apparatus | Sukeyoshi Tsunekawa, Shunji Sasabe | 1988-01-05 |
| 4710398 | Semiconductor device and manufacturing method thereof | Takashi Nishida | 1987-12-01 |
| 4599135 | Thin film deposition | Sukeyoshi Tsunekawa, Hiroshi Morisaki, Sadayuki Okudaira, Kiichiro Mukai | 1986-07-08 |
| 4539616 | Thin film magnetic head and fabricating method thereof | Isamu Yuito, Kazuo Shiiki, Atsushi Saiki, Noriyuki Kumasaka, Yoshihiro Shiroishi +1 more | 1985-09-03 |
| 4394245 | Sputtering apparatus | Sukeyoshi Tsunekawa, Hiroshi Morisaki, Seiki Harada | 1983-07-19 |