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Process for manufacturing semiconductor integrated circuit device |
Naofumi Ohashi, Junji Noguchi, Toshinori Imai, Hizuru Yamaguchi, Nobuo Owada +2 more |
2012-03-06 |
| 7947596 |
Semiconductor device and method of manufacturing the same |
Kenichi Takeda, Daisuke Ryuzaki, Toshiyuki Mine |
2011-05-24 |
| 7659201 |
Process for manufacturing semiconductor integrated circuit device |
Naofumi Ohashi, Junji Noguchi, Toshinori Imai, Hizuru Yamaguchi, Nobuo Owada +2 more |
2010-02-09 |
| 7563716 |
Polishing method |
Seiichi Kondo, Yoshio Homma, Noriyuki Sakuma, Kenichi Takeda |
2009-07-21 |
| 7510970 |
Process for manufacturing semiconductor integrated circuit device |
Naofumi Ohashi, Junji Noguchi, Toshinori Imai, Hizuru Yamaguchi, Nobuo Owada +2 more |
2009-03-31 |
| 7279425 |
Polishing method |
Seiichi Kondo, Yoshio Homma, Noriyuki Sakuma, Kenichi Takeda |
2007-10-09 |
| 7132367 |
Polishing method |
Seiichi Kondo, Yoshio Homma, Noriyuki Sakuma, Kenichi Takeda |
2006-11-07 |
| 7122900 |
Semiconductor device and method manufacturing the same |
Kenichi Takeda, Daisuke Ryuzaki, Toshiyuki Mine |
2006-10-17 |
| 7081417 |
Manufacturing method for electronic device and multiple layer circuits thereof |
Shuichi Nagasawa, Yoshihiro Kitagawa, Mutsuo Hidaka, Keiichi Tanabe |
2006-07-25 |
| 6864584 |
Semiconductor device |
Yuko Hanaoka, Kenichi Takeda, Daisuke Kodama, Noriyuki Sakuma |
2005-03-08 |
| 6800557 |
Process for manufacturing semiconductor integrated circuit device |
Naofumi Ohashi, Junji Noguchi, Toshinori Imai, Hizuru Yamaguchi, Nobuo Owada +2 more |
2004-10-05 |
| 6680541 |
Semiconductor device and process for producing the same |
Takeshi Furusawa, Daisuke Ryuzaki, Noriyuki Sakuma, Shuntaro Machida, Ryou Yoneyama |
2004-01-20 |
| 6596638 |
Polishing method |
Seiichi Kondo, Yoshio Homma, Noriyuki Sakuma, Kenichi Takeda |
2003-07-22 |
| 6531400 |
Process for manufacturing semiconductor integrated circuit device |
Naofumi Ohashi, Junji Noguchi, Toshinori Imai, Hizuru Yamaguchi, Nobuo Owada +2 more |
2003-03-11 |
| 6458674 |
Process for manufacturing semiconductor integrated circuit device |
Naofumi Ohashi, Junji Noguchi, Toshinori Imai, Hizuru Yamaguchi, Nobuo Owada +2 more |
2002-10-01 |
| 6376345 |
Process for manufacturing semiconductor integrated circuit device |
Naofumi Ohashi, Junji Noguchi, Toshinori Imai, Hizuru Yamaguchi, Nobuo Owada +2 more |
2002-04-23 |
| 6358838 |
Semiconductor device and process for producing the same |
Takeshi Furusawa, Daisuke Ryuzaki, Noriyuki Sakuma, Shuntaro Machida, Ryou Yoneyama |
2002-03-19 |
| 6117775 |
Polishing method |
Seiichi Kondo, Yoshio Homma, Noriyuki Sakuma, Kenichi Takeda |
2000-09-12 |
| 4897709 |
Titanium nitride film in contact hole with large aspect ratio |
Natsuki Yokoyama, Yoshio Homma, Kiichiro Mukai |
1990-01-30 |
| 4887146 |
Semiconductor device |
— |
1989-12-12 |