| 6478977 |
Polishing method and apparatus |
Shigeo Moriyama, Katsuhiko Yamaguchi, Yoshio Homma, Yoshihiro Ishida, Ryousei Kawa-ai |
2002-11-12 |
| 6180020 |
Polishing method and apparatus |
Shigeo Moriyama, Katsuhiko Yamaguchi, Yoshio Homma, Yoshihiro Ishida, Ryousei Kawa-ai |
2001-01-30 |
| 5815396 |
Vacuum processing device and film forming device and method using same |
Hideaki Shimamura, Yuji Yoneoka, Shigeru Kobayashi, Satosi Kisimoto, Hiroyuki Shida +6 more |
1998-09-29 |
| 5707500 |
Vacuum processing equipment, film coating equipment and deposition method |
Hideaki Shimamura, Yuji Yoneoka, Shigeru Kobayashi, Satosi Kisimoto, Hiroyuki Shida +6 more |
1998-01-13 |
| 4721535 |
Solar cell |
Haruo Itoh, Toshikazu Shimada, Shin-ichi Muramatsu, Nobuo Nakamura |
1988-01-26 |
| 4642412 |
Photo-electronic conversion apparatus with light pattern discriminator |
Shinichi Muramatsu, Toshikazu Shimada, Haruo Itoh, Nobuo Nakamura |
1987-02-10 |