Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6171641 | Vacuum processing apparatus, and a film deposition apparatus and a film deposition method both using the vacuum processing apparatus | Akira Okamoto, Shigeru Kobayashi, Hideaki Shimamura, Susumu Tsuzuku, Eisuke Nishitani +1 more | 2001-01-09 |
| 5815396 | Vacuum processing device and film forming device and method using same | Hideaki Shimamura, Shigeru Kobayashi, Satosi Kisimoto, Sunao Matsubara, Hiroyuki Shida +6 more | 1998-09-29 |
| 5707500 | Vacuum processing equipment, film coating equipment and deposition method | Hideaki Shimamura, Shigeru Kobayashi, Satosi Kisimoto, Sunao Matsubara, Hiroyuki Shida +6 more | 1998-01-13 |
| 4963239 | Sputtering process and an apparatus for carrying out the same | Hideaki Shimamura, Masao Sakata, Shigeru Kobayashi, Tsuneaki Kamei, Tsuneyoshi Kawahito +2 more | 1990-10-16 |