| 9768045 |
Substrate storing container |
Chiaki Matsutori, Tsuyoshi Nagashima, Takaharu Oyama, Shuichi Inoue, Hiroki Yamagishi +1 more |
2017-09-19 |
| 9711385 |
Substrate storage container |
Kazumasa Ohnuki, Hiroki Yamagishi, Tsuyoshi Nagashima, Shuichi Inoue, Chiaki Matsutori +1 more |
2017-07-18 |
| 9698033 |
Substrate storing container |
Chiaki Matsutori, Tsuyoshi Nagashima, Takaharu Oyama, Shuichi Inoue, Hiroki Yamagishi +1 more |
2017-07-04 |
| 9387960 |
Substrate storing container |
Tsuyoshi Nagashima, Shuichi Inoue, Takaharu Oyama, Chiaki Matsutori, Kazumasa Ohnuki +1 more |
2016-07-12 |
| 8960442 |
Wafer storing container |
Takaharu Oyama, Chiaki Matsutori, Tsuyoshi Nagashima, Shuichi Inoue, Hiroki Yamagishi +1 more |
2015-02-24 |
| 8627959 |
Substrate storage container |
Kazumasa Ohnuki, Satoshi Odashima |
2014-01-14 |
| 6224676 |
Gas supply apparatus and film forming apparatus |
Katsunori Nakajima, Eiji Setoyama, Koji Ishiguro, Hikaru Saruta |
2001-05-01 |
| 5815396 |
Vacuum processing device and film forming device and method using same |
Hideaki Shimamura, Yuji Yoneoka, Shigeru Kobayashi, Satosi Kisimoto, Sunao Matsubara +6 more |
1998-09-29 |
| 5707500 |
Vacuum processing equipment, film coating equipment and deposition method |
Hideaki Shimamura, Yuji Yoneoka, Shigeru Kobayashi, Satosi Kisimoto, Sunao Matsubara +6 more |
1998-01-13 |