Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7098156 | Method of fabrication of semiconductor integrated circuit device | Takayuki Wakabayashi, Yasuo Kiguchi, Atsuyoshi Koike | 2006-08-29 |
| 6462411 | Semiconductor wafer processing apparatus for transferring a wafer mount | Tomoji Watanabe, Nobuyuki Mise, Norio Suzuki, Yoshihiko Sakurai, Toshiya Uenishi +3 more | 2002-10-08 |
| 5001327 | Apparatus and method for performing heat treatment on semiconductor wafers | Shigeki Hirasawa, Takuji Torii, Tomoji Watanabe, Toshihiro Komatsu, Kazuo Honma +3 more | 1991-03-19 |