Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10131992 | Substrate processing apparatus, method of controlling substrate processing apparatus, method of maintaining substrate processing apparatus, and recording medium | Susumu NISHIURA, Hiroyuki Mitsui, Hiroshi Ekko | 2018-11-20 |
| 10096501 | Maintenance method of substrate processing apparatus, method for manufacturing semiconductor device, substrate processing apparatus, and storage medium capable of reading maintenance program of substrate processing apparatus | — | 2018-10-09 |
| 9690879 | Substrate processing apparatus, method of manufacturing semiconductor device, and method of generating recipe | Hiroyuki Mitsui, Susumu NISHIURA, Hiroshi Ekko, Kazuo NAKAYA, Osamu Morita | 2017-06-27 |
| 8482426 | Substrate processing apparatus | Tsukasa Iida, Akihiko Yoneda | 2013-07-09 |
| 7808396 | Substrate processing apparatus | Tsukasa Iida, Akihiko Yoneda | 2010-10-05 |