Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10903098 | Substrate processing system and substrate processing apparatus | Kazuhide Asai, Tetsuyuki MAEDA, Naoya Miyashita, Nobuyuki Miyakawa, Tadashi Okazaki +1 more | 2021-01-26 |
| 10295991 | Substrate processing apparatus and recording medium | — | 2019-05-21 |
| 10290516 | Substrate processing apparatus, maintenance method, and maintenance program | Hiroshi Kotani, Yasuhiro MIZUGUCHI | 2019-05-14 |
| 8600539 | Substrate processing apparatus | — | 2013-12-03 |
| 8482426 | Substrate processing apparatus | Tsukasa Iida, Kaori Inoshima | 2013-07-09 |
| 7808396 | Substrate processing apparatus | Tsukasa Iida, Kaori Inoshima | 2010-10-05 |
| 7494941 | Manufacturing method of semiconductor device, and substrate processing apparatus | Osamu Kasahara, Kiyohiko Maeda | 2009-02-24 |